Atomic Layer Deposition System (including oxide- and nitride-based precursors and capabilities of 3D, powder, and planar configurations) with integration to Argon-gas-filled glovebox
Ion Sputtering with Multiple Sputtering Targets
Spinning Coaters (both inside and outside Argon-gas-filled glovebox)
Planetary Ball Mill
Vibrating Ball Mill
Temperature Controllable Pressing Equipment
Hydraulic Press
Box Furnance
Tube Furnace
Multiple Environmental Chambers
Vacuum Oven
Multiple Configured Vacuum Pumps
Materials Preparation
Multiple Argon-gas-filled Gloveboxes
Materials Testing and Characterization
Multiple-Channel (> 100 channels) Battery Cell Cyclers integrated with Environmental Chamber, including various cell testing configurations: coin cell, pouch cell, Swagelok cell, and split cell
Multiple-Channel (> 10 channels) Electrochemical Impedance Spectroscopy Measurement Capabilities integrated with Environmental Chamber, including various cell testing configurations: coin cell, pouch cell, Swagelok cell, and split cell